Title

Fundamental Theory of Resonant MEMS Devices

Document Type

Contribution to Book

Language

eng

Format of Original

16 p.

Publication Date

2015

Publisher

Wiley-Blackwell

Source Publication

Resonant MEMS

Source ISSN

978-3-527-33545-9

Comments

"Fundamental Theory of Resonant MEMS Devices," in Resonant MEMS. Eds. Oliver Brand, Isabelle Dufour, Stephen M. Heinrich, and Fabien Josse. Weinheim, Germany : Wiley-VCH Verlag GmbH & Co. KGaA, 2015: 3-28. Publisher Link.