Cantilever-based Resonant Microsensors with Integrated Temperature Modulation for Transient Chemical Analysis
Format of Original
Institute of Electrical and Electronics Engineers (IEEE)
2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems
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This work introduces a resonant cantilever platform with integrated temperature modulation for real-time chemical sensing. Embedded heaters allow for rapid thermal cycling of individual sensors, thereby enabling real-time transient signal analysis without the need for a microfluidic setup to switch between analyte and reference gases. Compared to traditional mass-sensitive microsensors operating in steady state, the on-chip generation of signal transients provides additional information for analyte discrimination.