Title

Cantilever-based Resonant Microsensors with Integrated Temperature Modulation for Transient Chemical Analysis

Document Type

Conference Proceeding

Language

eng

Format of Original

4 p.

Publication Date

6-2015

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Source Publication

2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems

Original Item ID

doi: 10.1109/TRANSDUCERS.2015.7181223

Abstract

This work introduces a resonant cantilever platform with integrated temperature modulation for real-time chemical sensing. Embedded heaters allow for rapid thermal cycling of individual sensors, thereby enabling real-time transient signal analysis without the need for a microfluidic setup to switch between analyte and reference gases. Compared to traditional mass-sensitive microsensors operating in steady state, the on-chip generation of signal transients provides additional information for analyte discrimination.

Comments

Published as part of the proceedings of the conference, 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, 2015: 1511-1514. DOI.