Document Type

Conference Proceeding

Language

eng

Format of Original

4 p.

Publication Date

2014

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Source Publication

2014 IEEE Sensors Proceedings

Original Item ID

doi: 10.1109/ICSENS.2014.6985336

Abstract

Dynamic-mode cantilever-based structures supporting end masses are frequently used as MEMS/NEMS devices in application areas as diverse as chemical/biosensing, atomic force microscopy, and energy harvesting. This paper presents a new analytical solution for the free vibration of a cantilever with a rigid end mass of finite size. The effects of both translational and rotational inertia as well as horizontal eccentricity of the end mass are incorporated into the model. This model is general regarding the end-mass distribution/geometry and is validated here for the commonly encountered geometries of T- and U-shaped cantilevers. Comparisons with 3D FEA simulations and experiments on silicon and organic MEMS are quite encouraging. The new solution gives insight into device behavior, provides an efficient tool for preliminary design, and may be extended in a straightforward manner to account for inherent energy dissipation in the case of organic-based cantilevers.

Comments

Accepted version. Published as part of the proceedings of the conference, 2014 IEEE Sensors, 2014: 1648-1651. DOI. © Institute of Electrical and Electronics Engineers (IEEE) 2014. Used with permission.

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