Document Type

Article

Language

eng

Publication Date

5-2014

Publisher

American Institute of Physics

Source Publication

Biomicrofluidics

Source ISSN

1932-1058

Original Item ID

doi: 10.1063/1.4875656

Abstract

A microfabricated calorimeter (μ-calorimeter) with an enclosed reaction chamber is presented. The 3D micromachined reaction chamber is capable of analyzing liquid samples with volume of 200 nl. The thin film low-stress silicon nitride membrane is used to reduce thermal mass of the calorimeter and increase the sensitivity of system. The μ-calorimeter has been designed to perform DC and AC calorimetry, thermal wave analysis, and differential scanning calorimetry. The μ-calorimeter fabricated with an integrated heater and a temperature sensor on opposite sides of the reaction chamber allows to perform thermal diffusivity and specific heat measurements on liquid samples with same device. Measurement results for diffusivity and heat capacitance using time delay method and thermal wave analysis are presented.

Comments

Published version. Biomicrofluidics, Vol. 8, No. 3 (May 2014): 034101. DOI. © American Institute of Physics 2014. Used with permission.

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