Title

A Microfluidic Device for Thermal Particle Detection

Document Type

Article

Language

eng

Format of Original

8 p.

Publication Date

11-2014

Publisher

Springer

Source Publication

Microfluidics and Nanofluidics

Source ISSN

1613-4982

Original Item ID

doi: 10.1007/s10404-014-1369-z

Abstract

We demonstrate the use of heat to count microscopic particles. A thermal particle detector (TPD) was fabricated by combining a 500-nm-thick silicon nitride membrane containing a thin-film resistive temperature detector with a silicone elastomer microchannel. Particles with diameters of 90 and 200 μm created relative temperature changes of 0.11 and −0.44 K, respectively, as they flowed by the sensor. A first-order lumped thermal model was developed to predict the temperature changes. Multiple particles were counted in series to demonstrate the utility of the TPD as a particle counter.

Comments

Microfluidics and Nanofluidics, Vol. 17, No. 5 (November 2014): 871-878. DOI.