Title

Nano-electromechanical Zero-dimensional Freestanding Nanogap Actuator

Document Type

Article

Publication Date

1-2011

Source Publication

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference

Abstract

Micromachined free standing nanogap with metal electrodes is presented. The gap size is as small as 17 nm, and can be reduced further with electrostatic or piezoelectric actuation. The nanoscale gap is fabricated by industrial standard optical lithography and anisotropic wet chemical Si etching. Electron transport between the metal electrodes with optical stimulus enhancing photon-electron coupling (plasmon) is presented.

Comments

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference. January 2011. DOI: 10.1109/MEMSYS.2011.5734686