Nano-electromechanical Zero-dimensional Freestanding Nanogap Actuator
Format of Original
Institute of Electrical and Electronics Engineers
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference
Original Item ID
Micromachined free standing nanogap with metal electrodes is presented. The gap size is as small as 17 nm, and can be reduced further with electrostatic or piezoelectric actuation. The nanoscale gap is fabricated by industrial standard optical lithography and anisotropic wet chemical Si etching. Electron transport between the metal electrodes with optical stimulus enhancing photon-electron coupling (plasmon) is presented.