Title

6.4 GHz Acoustic Sensor for In-situ Monitoring of AFM Tip Wear

Document Type

Article

Publication Date

1-2011

Source Publication

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference

Abstract

This paper demonstrates an acoustic sensor that can resolve atomic force microscopy (AFM) tip blunting with a frequency sensitivity of 0.007%. The AFM tip is fabricated on a thin film piezoelectric aluminum nitride (AlN) membrane that is excited as a film bulk acoustic resonator (FBAR). We demonstrate that cutting 0.98 μm off of the tip apex results in a resonance frequency change of 0.4MHz at 6.387GHz. This work demonstrates the potential for in-situ monitoring of AFM tip wear.

Comments

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference. January 2011. DOI: 10.1109/MEMSYS.2011.5734476