6.4 GHz Acoustic Sensor for In-situ Monitoring of AFM Tip Wear

Authors

T.J. Cheng, Marquette UniversityFollow
Jun Hyun Han, Marquette UniversityFollow
Michael Ziwisky, Marquette University
Chung-Hoon Lee, Marquette UniversityFollow
S.A. Bhave, Marquette University

Document Type

Article

Language

eng

Format of Original

4 p.

Publication Date

1-2011

Publisher

Institute of Electrical and Electronics Engineers

Source Publication

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference

Source ISSN

9781424496327

Original Item ID

doi: 10.1109/MEMSYS.2011.5734476

Abstract

This paper demonstrates an acoustic sensor that can resolve atomic force microscopy (AFM) tip blunting with a frequency sensitivity of 0.007%. The AFM tip is fabricated on a thin film piezoelectric aluminum nitride (AlN) membrane that is excited as a film bulk acoustic resonator (FBAR). We demonstrate that cutting 0.98 μm off of the tip apex results in a resonance frequency change of 0.4MHz at 6.387GHz. This work demonstrates the potential for in-situ monitoring of AFM tip wear.

Comments

Accepted version. Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference. January 2011. DOI © 2011 IEEE. used with permission.

Recommended Citation

Cheng, T.J.; Han, Jun Hyun; Ziwisky, Michael; Lee, Chung-Hoon; and Bhave, S.A., "6.4 GHz Acoustic Sensor for In-situ Monitoring of AFM Tip Wear" (2011). Electrical and Computer Engineering Faculty Research and Publications. 9.
https://epublications.marquette.edu/electric_fac/9