Format of Original
Institute of Electrical and Electronics Engineers (IEEE)
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference
Original Item ID
In this work, the chemical sensitivity of mass-sensitive chemical microsensors with a uniform layer sandwich structure vibrating in their lateral or in-plane flexural modes is investigated. It is experimentally verified that the relative chemical sensitivity of such resonant microsensors is -to a first order- independent of the microstructure's in-plane dimensions and the flexural eigenmode used, and only depends on the layer thicknesses and densities as well as the sorption properties of the sensing film. Important implications for the design of mass-sensitive chemical microsensors are discussed, whereby the designer can focus on the layer stack to optimize the chemical sensitivity and on the in-plane dimensions and mode shape to optimize the resonator's frequency stability.