Title

Contact Force Models, including Electric Contact Deformation, for Electrostatically Actuated, Cantilever-Style, RF MEMS Switches

Document Type

Contribution to Book

Publication Date

2004

Publisher

Taylor & Francis (CRC Press)

Source Publication

Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

Source ISSN

9780972842280

Comments

"Contact Force Models, including Electric Contact Deformation, for Electrostatically Actuated, Cantilever-Style, RF MEMS Switches" in Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2. Taylor & Francis (CRC Press) 2004: 219-223. Publisher link.

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