Format of Original
Institute of Electrical and Electronics Engineers
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference
Original Item ID
This paper demonstrates an acoustic sensor that can resolve atomic force microscopy (AFM) tip blunting with a frequency sensitivity of 0.007%. The AFM tip is fabricated on a thin film piezoelectric aluminum nitride (AlN) membrane that is excited as a film bulk acoustic resonator (FBAR). We demonstrate that cutting 0.98 μm off of the tip apex results in a resonance frequency change of 0.4MHz at 6.387GHz. This work demonstrates the potential for in-situ monitoring of AFM tip wear.
Cheng, T.J.; Han, Jun Hyun; Ziwisky, Michael; Lee, Chung-Hoon; and Bhave, S.A., "6.4 GHz Acoustic Sensor for In-situ Monitoring of AFM Tip Wear" (2011). Electrical and Computer Engineering Faculty Research and Publications. 9.
Accepted version. Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference. January 2011. DOI © 2011 IEEE. used with permission.