Resonant Characteristics of Rectangular Hammerhead Microcantilevers Vibrating Laterally in Viscous Liquid Media
Format of Original
Institute of Electrical and Electronics Engineers (IEEE)
2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC)
Original Item ID
The resonant characteristics of laterally vibrating rectangular hammerhead microcantilevers in viscous liquid media are investigated. The rectangular hammerhead microcantilever is modeled as an Euler-Bernoulli beam (stem) and a rigid body (head). A modified semi-analytical expression for the hydrodynamic function in terms of the Reynolds number, Re, and aspect ratio, h/b, is proposed to rapidly evaluate the sensing characteristics. Using this expression, the resonance frequency, quality factor and normalized surface mass sensitivity are investigated as a function of the dimensions of the microcantilever and liquid properties. Guidelines for design of hammerhead microcantilever geometry are proposed to achieve efficient sensing platforms for liquid-phase operation. The improvement in the sensing area and characteristics are expected to yield higher sensitivity of detection and improved signal-to-noise ratio in liquid-phase chemical sensing applications.