e-Publications@Marquette

Title

Integrated Freestanding Single-Crystal Silicon Nanowires: Conductivity and Surface Treatment

Authors

Chung-Hoon Lee, Marquette UniversityFollow
Clark Ritz, University of Wisconsin - Madison
Minghuang Huang, University of Wisconsin - Madison
Michael Ziwisky, Marquette University
Robert Blise, Marquette University
Max Lagally, University of Wisconsin - Madison

Document Type

Article

Publication Date

2011

Source Publication

Nanotechnology

Abstract

Integrated freestanding single-crystal silicon nanowires with typical dimension of 100 nm × 100 nm × 5 µm are fabricated by conventional 1:1 optical lithography and wet chemical silicon etching. The fabrication procedure can lead to wafer-scale integration of silicon nanowires in arrays. The measured electrical transport characteristics of the silicon nanowires covered with/without SiO₂ support a model of Fermi level pinning near the conduction band. The I–V curves of the nanowires reveal a current carrier polarity reversal depending on Si–SiO₂ and Si–H bonds on the nanowire surfaces

Comments

Post-print.

Nanotechnology, Volume 22 No. 055704 (2011), DOI: 10.1088/0957-4484/22/5/055704.