Document Type
Article
Language
eng
Publication Date
5-2014
Publisher
American Institute of Physics
Source Publication
Biomicrofluidics
Source ISSN
1932-1058
Original Item ID
doi: 10.1063/1.4875656
Abstract
A microfabricated calorimeter (μ-calorimeter) with an enclosed reaction chamber is presented. The 3D micromachined reaction chamber is capable of analyzing liquid samples with volume of 200 nl. The thin film low-stress silicon nitride membrane is used to reduce thermal mass of the calorimeter and increase the sensitivity of system. The μ-calorimeter has been designed to perform DC and AC calorimetry, thermal wave analysis, and differential scanning calorimetry. The μ-calorimeter fabricated with an integrated heater and a temperature sensor on opposite sides of the reaction chamber allows to perform thermal diffusivity and specific heat measurements on liquid samples with same device. Measurement results for diffusivity and heat capacitance using time delay method and thermal wave analysis are presented.
Recommended Citation
Davaji, Benyamin; Bak, Hye Jeong; Chang, Woo-Jin; and Lee, Chung-Hoon, "A Novel On-chip Three-dimensional Micromachined Calorimeter with Fully Enclosed and Suspended Thin-film Chamber for Thermal Characterization of Liquid Samples" (2014). Electrical and Computer Engineering Faculty Research and Publications. 60.
https://epublications.marquette.edu/electric_fac/60
Comments
Published version. Biomicrofluidics, Vol. 8, No. 3 (May 2014): 034101. DOI. © 2014 American Institute of Physics. Used with permission.