A Microfluidic Device for Thermal Particle Detection

Authors

Ashwin Kumar Vutha
Benyamin Davaji, Marquette UniversityFollow
Chung-Hoon Lee, Marquette UniversityFollow
Glenn M. Walker, NC State University

Document Type

Article

Language

eng

Format of Original

8 p.

Publication Date

11-2014

Publisher

Springer

Source Publication

Microfluidics and Nanofluidics

Source ISSN

1613-4982

Original Item ID

doi: 10.1007/s10404-014-1369-z

Abstract

We demonstrate the use of heat to count microscopic particles. A thermal particle detector (TPD) was fabricated by combining a 500-nm-thick silicon nitride membrane containing a thin-film resistive temperature detector with a silicone elastomer microchannel. Particles with diameters of 90 and 200 μm created relative temperature changes of 0.11 and −0.44 K, respectively, as they flowed by the sensor. A first-order lumped thermal model was developed to predict the temperature changes. Multiple particles were counted in series to demonstrate the utility of the TPD as a particle counter.

Comments

Accepted version. Microfluidics and Nanofluidics, Vol. 17, No. 5 (November 2014): 871-878. DOI. © 2014 Springer. Used with permission.

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Recommended Citation

Vutha, Ashwin Kumar; Davaji, Benyamin; Lee, Chung-Hoon; and Walker, Glenn M., "A Microfluidic Device for Thermal Particle Detection" (2014). Electrical and Computer Engineering Faculty Research and Publications. 63.
https://epublications.marquette.edu/electric_fac/63