Format of Original
Institute of Electrical and Electronics Engineers (IEEE)
2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems
Original Item ID
This work introduces a resonant cantilever platform with integrated temperature modulation for real-time chemical sensing. Embedded heaters allow for rapid thermal cycling of individual sensors, thereby enabling real-time transient signal analysis without the need for a microfluidic setup to switch between analyte and reference gases. Compared to traditional mass-sensitive microsensors operating in steady state, the on-chip generation of signal transients provides additional information for analyte discrimination.
Carron, C.; Getz, P.; Heinrich, Stephen M.; Josse, Fabien; and Brand, Oliver, "Cantilever-based Resonant Microsensors with Integrated Temperature Modulation for Transient Chemical Analysis" (2015). Civil and Environmental Engineering Faculty Research and Publications. 104.