Document Type

Article

Language

eng

Publication Date

12-16-2019

Publisher

American Chemical Society

Source Publication

ACS Sensors

Source ISSN

2379-3694

Abstract

Thermally excited and piezoresistively detected in-plane cantilever resonators have been previously demonstrated for gas- and liquid-phase chemical and biosensing applications. In this work, the hammerhead resonator geometry, consisting of a cantilever beam supporting a wider semicircular “head”, vibrating in an in-plane vibration mode, is shown to be particularly effective for gas-phase sensing with estimated limits of detection in the sub-ppm range for volatile organic compounds. This paper discusses the hammerhead resonator design and the particular advantages of the hammerhead geometry, while also presenting mechanical characterization, optical characterization, and chemical sensing results. These data highlight the distinct advantages of the hammerhead geometry over other cantilever designs.

Comments

Accepted version. ACS Sensors, Vol. 5, No. 1 (December 16, 2019): 73-82. DOI. © 2019 American Chemical Society. Used with permission.

Available for download on Wednesday, December 16, 2020

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