Date of Award

Summer 1972

Document Type

Dissertation - Restricted

Degree Name

Doctor of Philosophy (PhD)


Mechanical Engineering


Present day manufacturing of integrated circuits is a multiphase process, one of which is the formation of the n-p and p-n junctions necessary for the electronic devices. Presently, the most widely used method to accomplish this is to diffuse impurity atoms into a silicon wafer. A brief description of the equipment used and the diffusion process follows to acquaint the reader with the problems involved...



Restricted Access Item

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