Date of Award
Summer 1972
Document Type
Dissertation - Restricted
Degree Name
Doctor of Philosophy (PhD)
Department
Mechanical Engineering
Abstract
Present day manufacturing of integrated circuits is a multiphase process, one of which is the formation of the n-p and p-n junctions necessary for the electronic devices. Presently, the most widely used method to accomplish this is to diffuse impurity atoms into a silicon wafer. A brief description of the equipment used and the diffusion process follows to acquaint the reader with the problems involved...
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