Document Type




Format of Original

8 p.

Publication Date




Source Publication

Sensors and Actuators B: Chemical

Source ISSN


Original Item ID

doi: 10.1016/j.snb.2012.01.035


The influence of the beam geometry on the quality factor and resonance frequency of resonant silicon cantilever beams vibrating in their fundamental in-plane flexural mode in water has been investigated. Compared to cantilevers vibrating in their first out-of-plane flexural mode, utilizing the in-plane mode results in reduced damping and reduced mass loading by the surrounding fluid. Quality factors as high as 86 have been measured in water for cantilevers with a 20 μm thick silicon layer. Based on the experimental data, design guidelines are established for beam dimensions that ensure maximal Q-factors and minimal mass loading by the surrounding fluid, thus improving the limit-of-detection of mass-sensitive biochemical sensors. Elementary theory is also presented to help explain the observed trends. Additional discussion focuses on the tradeoffs that exist in designing liquid-phase biochemical sensors using in-plane cantilevers.


Accepted version. Sensors and Actuators B: Chemical, Vol. 164, No. 1 (March 31, 2012): 7-14. DOI. © 2012 Elsevier. Used with permission.

NOTICE: this is the author’s version of a work that was accepted for publication in Sensors and Actuators B: Chemical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Sensors and Actuators B: Chemical, VOL 164, ISSUE 1, March 31, 2014, DOI.