Fabrication Process Comparison and Dynamics Evaluation of Electrothermal Actuators for a Prototype MEMS Safe and Arming Devices

Authors

Scott A. Ostrow II, Air Force Institute of TechnologyFollow
Robert A. Lake, Air Force Institute of TechnologyFollow
J. P. Lombardi III, Air Force Institute of TechnologyFollow
Ronald A. Coutu Jr., Marquette UniversityFollow
Lavern A. Starman, Air Force Institute of TechnologyFollow

Document Type

Article

Language

eng

Publication Date

10-2012

Publisher

Springer

Source Publication

Experimental Mechanics

Source ISSN

0014-4851

Abstract

Electrothermal actuators fabricated using the Polysilicon Multi-User MEMS Process (PolyMUMPs) and the Sandia Ultra-Planar, Multi-Level MEMS Technology 5 (SUMMiT V) have been investigated for use in integrated microelectromechanical systems (MEMS) safe and arming devices. The fabricated electrothermal actuators have been dynamically tested to determine and compare the responses of devices from both processes. Furthermore, the integration of these devices into a safe and arming device were tested and investigated for each process. Initial results indicate that the SUMMiT devices provide the most optimum results based on consistency of operation and reliability.

Comments

Accepted version. Experimental Mechanics, Vol. 52, No. 8 (October 2012): 1229-1238. DOI. © 2012 Springer Nature Switzerland AG. Part of Springer Nature.. Used with permission.

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Ronald A. Coutu, Jr. was affiliated with Air Force Institute of Technology at the time of publication.

Recommended Citation

Ostrow, Scott A. II; Lake, Robert A.; Lombardi, J. P. III; Coutu, Ronald A. Jr.; and Starman, Lavern A., "Fabrication Process Comparison and Dynamics Evaluation of Electrothermal Actuators for a Prototype MEMS Safe and Arming Devices" (2012). Electrical and Computer Engineering Faculty Research and Publications. 362.
https://epublications.marquette.edu/electric_fac/362