Title

MEMS Integrated Metamaterials with Variable Resonance Operating at RF Frequencies

Document Type

Article

Language

eng

Publication Date

2011

Publisher

Springer

Source Publication

MEMS and Nanotechnology

Source ISSN

2191-5644

Abstract

Metamaterials are engineered materials with integrated structures designed to produce a resonant response at specific frequencies. The capacitive and inductive properties of metamaterials effect the overall refractive index of the media in which an RF signal propagates by generating a resonant frequency response. Incorporating microelectromechanical systems (MEMS) into the structure adds the ability to tune metamaterials and generate a variable resonance. In this investigation, a resonant response is achieved for the 1 – 4 GHz range with tuning. Employing processing techniques to create microelectronic devices, different metamaterial designs are fabricated on quartz substrates. Using these modifications, a design which provides the ideal shift in resonance is selected to incorporate into future RF systems. This paper reports on the modeling, design, fabrication and testing of various designs of metamaterials incorporated with MEMS.

Comments

MEMS and Nanotechnology, Conference Proceedings of the Society for Experimental Mechanics Series, Vol. 4 (2011): 159-166. DOI.

Ronald A. Coutu was affiliated with Air Force Institute of Technology at the time of publication.

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