"Fundamental Theory of Resonant MEMS Devices" by Stephen M. Heinrich and Isabelle Dufour
 

Fundamental Theory of Resonant MEMS Devices

Document Type

Contribution to Book

Language

eng

Format of Original

16 p.

Publication Date

2015

Publisher

Wiley-Blackwell

Source Publication

Resonant MEMS

Source ISSN

978-3-527-33545-9

Comments

"Fundamental Theory of Resonant MEMS Devices," in Resonant MEMS. Eds. Oliver Brand, Isabelle Dufour, Stephen M. Heinrich, and Fabien Josse. Weinheim, Germany : Wiley-VCH Verlag GmbH & Co. KGaA, 2015: 3-28. DOI.

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