Fundamental Theory of Resonant MEMS Devices

Authors

Stephen M. Heinrich, Marquette UniversityFollow
Isabelle Dufour, Université de BordeauxFollow

Document Type

Contribution to Book

Language

eng

Format of Original

16 p.

Publication Date

2015

Publisher

Wiley-Blackwell

Source Publication

Resonant MEMS

Source ISSN

978-3-527-33545-9

Comments

"Fundamental Theory of Resonant MEMS Devices," in Resonant MEMS. Eds. Oliver Brand, Isabelle Dufour, Stephen M. Heinrich, and Fabien Josse. Weinheim, Germany : Wiley-VCH Verlag GmbH & Co. KGaA, 2015: 3-28. DOI.

Recommended Citation

Heinrich, Stephen M. and Dufour, Isabelle, "Fundamental Theory of Resonant MEMS Devices" (2015). Civil and Environmental Engineering Faculty Research and Publications. 103.
https://epublications.marquette.edu/civengin_fac/103