Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing Applications

Authors

Luke A. Beardslee, Georgia Institute of Technology - Main CampusFollow
Assim M. Addous, Georgia Institute of Technology - Main Campus
Stephen M. Heinrich, Marquette UniversityFollow
Fabien Josse, Marquette UniversityFollow
Isabelle Dufour, Université de BordeauxFollow
Oliver Brand, Georgia Institute of Technology - Main CampusFollow

Document Type

Article

Language

eng

Format of Original

3 p.

Publication Date

8-2010

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Source Publication

Journal of Microelectromechanical Systems

Source ISSN

1057-7157

Original Item ID

DOI: 10.1109/JMEMS.2010.2052093

Abstract

Thermally excited and piezoresistively detected bulk-micromachined cantilevers vibrating in their in-plane flexural resonance mode are presented. By shearing the surrounding fluid rather than exerting normal stress on it, the in-plane mode cantilevers exhibit reduced added fluid mass effects and improved quality factors in a fluid environment. In this letter, different cantilever geometries with in-plane resonance frequencies from 50 kHz to 2.2 MHz have been tested, with quality factors as high as 4200 in air and 67 in water.

Comments

Accepted version. Journal of Microelectromechanical Systems, Vol. 19, No. 4 (August 2010): 1015-1017. DOI. © 2010 IEEE. Used with permission.

Recommended Citation

Beardslee, Luke A.; Addous, Assim M.; Heinrich, Stephen M.; Josse, Fabien; Dufour, Isabelle; and Brand, Oliver, "Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing Applications" (2010). Civil and Environmental Engineering Faculty Research and Publications. 70.
https://epublications.marquette.edu/civengin_fac/70