Document Type
Conference Proceeding
Language
eng
Format of Original
4 p.
Publication Date
11-2010
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Source Publication
2010 IEEE Sensors Proceedings
Source ISSN
978-1-4244-8170-5
Original Item ID
doi: 10.1109/ICSENS.2010.5689930
Abstract
The influence of the beam geometry on the quality factor and resonance frequency of resonant silicon cantilever beams vibrating in their fundamental in-plane flexural mode has been investigated in air and water. Compared to cantilevers vibrating in their out-of-plane flexural mode, utilizing the in plane mode results in reduced damping and reduced mass loading by the surrounding fluid. Quality factors as high as 4,300 in air and 67 in water have been measured for cantilevers with a 12 μm thick silicon layer. This is in comparison to Q factors up to 1,500 in air and up to 20 in water for cantilevers vibrating in their fundamental out-of-plane bending mode. Based on the experimental data, design guidelines are established for beam dimensions that ensure maximal Q-factors and minimal mass loading by the surrounding fluid.
Recommended Citation
Beardslee, Luke A.; Addous, Assim M.; Demirci, Kemal S.; Brand, Oliver; Heinrich, Stephen M.; and Josse, Fabien, "Geometrical Optimization of Resonant Cantilevers Vibrating in In-Plane Bending Modes" (2010). Civil and Environmental Engineering Faculty Research and Publications. 56.
https://epublications.marquette.edu/civengin_fac/56
Comments
Accepted version. Published as part of the proceedings of the conference, 2010 IEEE Sensors, 2010: 1996-1999. DOI. © 2010 Institute of Electrical and Electronics Engineers (IEEE). Used with permission.