Document Type
Article
Language
eng
Publication Date
10-3-2011
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Source Publication
Journal of Microelectromechanical Systems
Source ISSN
1057-7157
Abstract
Two concentric split ring resonators (SRRs) or meta-atoms designed to have a resonant frequency of 14 GHz are integrated with microelectromechanical systems cantilever arrays to enable electrostatic tuning of the resonant frequency. The entire structure was fabricated monolithically to improve scalability and minimize losses from externally wire-bonded components. A cantilever array was fabricated in the gap of both the inner and outer SRRs and consisted of five evenly spaced beams with lengths ranging from 300 to 400 μm. The cantilevers pulled in between 15 and 24 V depending on the beam geometry. Each pulled-in beam increased the SRR gap capacitance resulting in an overall 1-GHz shift of the measured meta-atom resonant frequency.
Recommended Citation
Coutu, Ronald A. Jr.; Collins, Peter J.; Moore, Elizabeth A.; Langley, Derrick; Jussaume, Matthew E.; and Starman, Lavern A., "Electrostatically Tunable Meta-Atoms Integrated With In Situ Fabricated MEMS Cantilever Beam Arrays" (2011). Electrical and Computer Engineering Faculty Research and Publications. 337.
https://epublications.marquette.edu/electric_fac/337
ADA accessible version
Comments
Accepted version. Journal of Microelectromechanical Systems, Vol. 20, No. 6 (December 2011): 1366 - 1371. DOI. © 2011 IEEE. Used with permission.
Ronald A. Coutu was affiliated with the Air Force Institute of Technology, Wright-Patterson Air Force Base, Dayton, OH at the time of publication.