Document Type
Conference Proceeding
Language
English
Format of Original
4 p.
Publication Date
2013
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Source Publication
2013 IEEE Sensors Proceedings
Source ISSN
1930-0395
Original Item ID
doi: 10.1109/ICSENS.2013.6688335
Abstract
This work presents mass-sensitive hammerhead resonators with integrated recesses as a gas-phase chemical microsensor platform. Recesses are etched into the head region of the resonator to locally deposit chemically sensitive polymers by ink-jet printing. This permits the sensing films to be confined to areas that (a) are most effective in detecting mass loading and (b) are not strained during the in-plane vibrations of the resonator. As a result of the second point, even 5-μm thick polymer coatings on resonators with a 9-12 μm silicon thickness barely affect the Q-factor in air. This translates into higher frequency stability and ultimately higher sensor resolution compared to uniformly coated devices.
Recommended Citation
Carron, C.; Getz, P.; Su, J. J.; Gottfried, D. S.; Josse, Fabien; and Heinrich, Stephen M., "Cantilever-based Resonant Gas Sensors with Integrated Recesses for Localized Sensing Layer Deposition" (2013). Civil and Environmental Engineering Faculty Research and Publications. 22.
https://epublications.marquette.edu/civengin_fac/22
Comments
Accepted Version Published as part of the proceedings of the conference, 2013 IEEE Sensors, 2013. DOI.© 2013 Institute of Electrical and Electronics Engineers. Used with Permission.