Document Type

Conference Proceeding



Format of Original

10 p.

Publication Date



Society for Experimental Mechanics

Source Publication

MEMS and Nanotechnology: Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics

Source ISSN


Original Item ID

doi: 10.1007/978-3-319-00780-9_15


Dynamic-mode microcantilever-based devices are potentially well suited to biological and chemical sensing applications. However, when these applications involve liquid-phase detection, fluid-induced dissipative forces can significantly impair device performance. Recent experimental and analytical research has shown that higher in-fluid quality factors (Q) are achieved by exciting microcantilevers in the lateral flexural mode. However, experimental results show that, for microcantilevers having larger width-to-length ratios, the behaviors predicted by current analytical models differ from measurements. To more accurately model microcantilever resonant behavior in viscous fluids and to improve understanding of lateral-mode sensor performance, a new analytical model is developed, incorporating both viscous fluid effects and “Timoshenko beam” effects (shear deformation and rotatory inertia). Beam response is examined for two harmonic load types that simulate current actuation methods: tip force and support rotation. Results are expressed in terms of total beam displacement and beam displacement due solely to bending deformation, which correspond to current detection methods used with microcantilever-based devices (optical and piezoresistive detection, respectively). The influences of the shear, rotatory inertia, and fluid parameters, as well as the load/detection scheme, are investigated. Results indicate that load/detection type can impact the measured resonant characteristics and, thus, sensor performance, especially at larger values of fluid resistance.


Accepted version. Published as part of the proceedings of the conference, the 2013 Annual Conference on Experimental and Applied Mechanics, 2014: 115-124. DOI. © 2014 Society for Experimental Mechanics. Used with permission.