Document Type

Article

Language

eng

Format of Original

12 p.

Publication Date

2-2015

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Source Publication

Journal of Microelectromechanical Systems

Source ISSN

1057-7157

Original Item ID

doi: 10.1109/JMEMS.2014.2365719

Abstract

To overcome the detrimental effects of liquid environments on microelectromechanical systems resonator performance, the in-fluid vibration of a novel disk resonator supported by two electrothermally driven legs is investigated through analytical modeling and the effects of the system’s geometric/material parameters on the dynamic response are explored. The all-shear interaction device (ASID) is based on engaging the surrounding fluid primarily through shearing action. The theory comprises a continuous-system, multimodal model, and a single-degree-of-freedom model, the latter yielding simple formulas for the fundamental-mode resonant characteristics that often furnish excellent estimates to the results based on the more general model. Comparisons between theoretical predictions and previously published liquid-phase quality factor (Q) data (silicon devices in heptane) show that the theoretical results capture the observed trends and also give very good quantitative estimates, particularly for the highest Q devices. Moreover, the highest Q value measured in the earlier study (304) corresponded to a specimen whose disk radius-to-thickness ratio was 2.5, a value that compares well with the optimal value of 2.3 predicted by the present model. The insight furnished by the proposed theory is expected to lead to further improvements in ASID design to achieve unprecedented levels of performance for a wide variety of liquid-phase resonator applications.

Comments

Accepted version. Journal of Microelectromechanical Systems, Vol. 24, No. 1 (February 2015): 38-49. DOI. © Institute of Electrical and Electronic Engineers (IEEE) 2015. Used with permission.

© 2015 IEEE. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Marquette University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.

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