Document Type
Article
Language
eng
Format of Original
12 p.
Publication Date
2-2015
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Source Publication
Journal of Microelectromechanical Systems
Source ISSN
1057-7157
Original Item ID
doi: 10.1109/JMEMS.2014.2365719
Abstract
To overcome the detrimental effects of liquid environments on microelectromechanical systems resonator performance, the in-fluid vibration of a novel disk resonator supported by two electrothermally driven legs is investigated through analytical modeling and the effects of the system’s geometric/material parameters on the dynamic response are explored. The all-shear interaction device (ASID) is based on engaging the surrounding fluid primarily through shearing action. The theory comprises a continuous-system, multimodal model, and a single-degree-of-freedom model, the latter yielding simple formulas for the fundamental-mode resonant characteristics that often furnish excellent estimates to the results based on the more general model. Comparisons between theoretical predictions and previously published liquid-phase quality factor (Q) data (silicon devices in heptane) show that the theoretical results capture the observed trends and also give very good quantitative estimates, particularly for the highest Q devices. Moreover, the highest Q value measured in the earlier study (304) corresponded to a specimen whose disk radius-to-thickness ratio was 2.5, a value that compares well with the optimal value of 2.3 predicted by the present model. The insight furnished by the proposed theory is expected to lead to further improvements in ASID design to achieve unprecedented levels of performance for a wide variety of liquid-phase resonator applications.
Recommended Citation
Sotoudegan, Mohomad S.; Heinrich, Stephen M.; Josse, Fabien; Nigro, Nicholas J.; Dufour, Isabelle; and Brand, Oliver, "Analytical Modeling of a Novel High-Q Disk Resonator for Liquid-Phase Applications" (2015). Civil and Environmental Engineering Faculty Research and Publications. 42.
https://epublications.marquette.edu/civengin_fac/42
Included in
Civil and Environmental Engineering Commons, Electrical and Computer Engineering Commons, Mechanical Engineering Commons
Comments
Accepted version. Journal of Microelectromechanical Systems, Vol. 24, No. 1 (February 2015): 38-49. DOI. © Institute of Electrical and Electronic Engineers (IEEE) 2015. Used with permission.
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