Document Type

Article

Language

eng

Publication Date

6-23-2014

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Source Publication

Journal of Microelectromechanical Systems

Source ISSN

1057-7157

Abstract

In this paper, a microelectromechanical systems cantilever sensor was designed, modeled, and fabricated to measure the photoacoustic (PA) response of gases under very low vacuum conditions. The micromachined devices were fabricated using silicon-on-insulator wafers and then tested in a custom-built, miniature, vacuum chamber during this first-ever demonstration. Terahertz radiation was amplitude modulated to excite the gas under test and perform PA molecular spectroscopy. Experimental data show a predominantly linear response that directly correlates measured cantilever deflection to PA signals. Excellent low pressure (i.e., 2-40 mTorr) methyl cyanide PA spectral data were collected resulting in a system sensitivity of 1.97 × 10 -5 cm -1 and a normalized noise equivalent absorption coefficient of 1.39 × 10 -9 cm -1 W Hz -1/2 .

Comments

Accepted version. Journal of Microelectromechanical Systems, Vol. 24, No. 1 (February 2015): 218-223. DOI. © 2015 IEEE. Used with permission.

Ronald A. Coutu was affiliated with the Air Force Institute of Technology, Wright-Patterson Airforce Base, OH at the time of publication.

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