Unique Fabrication Method for Novel MEMS Micro-contact Structure

Document Type

Article

Language

eng

Publication Date

2013

Publisher

Springer

Source Publication

MEMS and Nanotechnology

Source ISSN

2191-5644

Abstract

Microelectromechanical systems (MEMS) switch reliability is a major obstacle for large-volume commercial applications despite offering lower power consumption, better isolation, and lower insertion loss compared to conventional field-effect transistors and PIN diodes (Yang et al. IEEE J Microelectromech Syst 18(2): 287–295, 2009). To enhance reliability and performance, MEMS researchers focus on the micro-contact lifecycle evolution based on material choice and design of the micro-contact. In order to examine the micro-contact phenomena and physics, a novel DC MEMS micro-contact structure has been developed. The structure is composed of a Gold contact pad and a layered Gold beam. The reliability and performance of a micro-contact is directly influenced by its ability to make and break its electrical connection. Its ability to separate from the contact area is a function of applied force, adhesion forces, and the restoring force. The layered Gold micro-contact structure was fabricated and the processing steps, performance, and experimental results of the device reliability of the device are presented.

Comments

MEMS and Nanotechnology, Conference Proceedings of the Society for Experimental Mechanics Series, Vol. 5 (2013): 49-55. DOI.

Ronald A. Coutu was affiliated with the Air Force Institute of Technology at the time of publication.

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