Contact Resistance Evolution of Highly Cycled, Lightly Loaded Micro-Contacts

Authors

Christopher Stilson, Air Force Institute of Technology
Ronald A. Coutu Jr., Marquette UniversityFollow

Document Type

Conference Proceeding

Language

eng

Publication Date

3-7-2014

Publisher

Society of Photo-Optical Instrumentation Engineers (SPIE)

Source Publication

Proceedings of SPIE 8975, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII

Abstract

Reliable microelectromechanical systems (MEMS) switches are critical for developing high performance radio frequency circuits like phase shifters. Engineers have attempted to improve reliability and lifecycle performance using novel contact metals, unique mechanical designs and packaging. Various test fixtures including: MEMS devices, atomic force microscopes (AFM) and nanoindentors have been used to collect resistance and contact force data. AFM and nanoindentor test fixtures allow direct contact force measurements but are severely limited by low resonance sensors, and therefore low data collection rates.

Comments

Published version. Published as a part of the Proceedings of SPIE 8975, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII, (March 7, 2014); 89750F . DOI. © (2014) Society of Photo-Optical Instrumentation Engineers (SPIE). Used with permission.

Ronald A Coutu was affiliated with the Air Force Institute of Technology at the time of publication.

Recommended Citation

Stilson, Christopher and Coutu, Ronald A. Jr., "Contact Resistance Evolution of Highly Cycled, Lightly Loaded Micro-Contacts" (2014). Electrical and Computer Engineering Faculty Research and Publications. 390.
https://epublications.marquette.edu/electric_fac/390