PVDF-TrFE Electroactive Polymer Based Micro-Electro-Mechanical Systems (MEMs) Structures

Authors

William G. Kaval, Air Force Institute of Technology
Robert A. Lake, Air Force Institute of TechnologyFollow
Ronald A. Coutu Jr., Marquette UniversityFollow

Document Type

Article

Language

eng

Publication Date

2017

Publisher

Springer

Source Publication

Micro and Nanomechanics

Source ISSN

2191-5644

Abstract

Electroactive polymer (EAP) has recently been receiving significant attention as smart materials for actuators and sensors for novel micro fabricated devices. Polymer film devices have demonstrated use as pressure sensors and shown potential for harvesting energy from the natural environment. Fabrication of sensing devices using copolymer films has been accomplished using standard lithography process. Materials such as P(VDF-TrFE) (polyvinyledenedifluoride-tetrafluoroethylene) copolymer films (1 m thick or less) were evaluated and presented a large relative permittivity and greater piezoelectric-phase without stretching. Mechanical analysis of experimental structures was also provided and led to key design rules for key post-processing steps to control the performance of the devices. Further investigations will be used to identify suitable micro-electro-mechanical systems (MEMs) structures.

Comments

Micro and Nanomechanics, Vol. 5 (2017): 11-17. DOI.

Recommended Citation

Kaval, William G.; Lake, Robert A.; and Coutu, Ronald A. Jr., "PVDF-TrFE Electroactive Polymer Based Micro-Electro-Mechanical Systems (MEMs) Structures" (2017). Electrical and Computer Engineering Faculty Research and Publications. 417.
https://epublications.marquette.edu/electric_fac/417