PVDF-TrFE Electroactive Polymer Based Micro-Electro-Mechanical Systems (MEMs) Structures
Micro and Nanomechanics
Electroactive polymer (EAP) has recently been receiving significant attention as smart materials for actuators and sensors for novel micro fabricated devices. Polymer film devices have demonstrated use as pressure sensors and shown potential for harvesting energy from the natural environment. Fabrication of sensing devices using copolymer films has been accomplished using standard lithography process. Materials such as P(VDF-TrFE) (polyvinyledenedifluoride-tetrafluoroethylene) copolymer films (1 m thick or less) were evaluated and presented a large relative permittivity and greater piezoelectric-phase without stretching. Mechanical analysis of experimental structures was also provided and led to key design rules for key post-processing steps to control the performance of the devices. Further investigations will be used to identify suitable micro-electro-mechanical systems (MEMs) structures.