Document Type

Article

Publication Date

5-2024

Publisher

MDPI

Source Publication

Micromachines

Source ISSN

2072-666X

Original Item ID

10.3390/mi15050597

Abstract

Microelectromechanical systems (MEMS) ohmic contact switches are considered to be a promising candidate for wireless communication applications. The longevity of MEMS switches is directly related to the reliability and performance of microcontacts. In this work, an improved microcontact test fixture with high actuation rates (KHz) and highly precise position control (nm) and force (nN) control was developed. Here, we collected microcontact performance data from initial contact tests (ICT) and microcontact reliability data from cold switched tests (CST). To perform these tests with our test fixture, we fabricated MEMS microcontact test structures with relatively high Young’s modulus electroplated Nickel (Ni)-based, fixed–fixed beam structure with Au/RuO2 bimetallic microcontacts. These structures were characterized for forces ranging from 200–1000 µN in ICT tests. In a CST test, the tested microcontact survived more than 200 million cycles at a 1 KHz cycle rate, with a stable contact resistance value ranging between 3.8–5.2 Ω. These experiments validate the potentiality of our microcontact test fixture, and will facilitate further investigation on advanced microcontacts to enhance the MEMS switch’s reliability.

Comments

Published version. Micromachines, Vol. 15, No. 5 (May 2024). DOI. © 2024 by the authors. Licensee MDPI, Basel, Switzerland. Used with permission.

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https:// creativecommons.org/licenses/by/ 4.0/).

Creative Commons License

Creative Commons Attribution 4.0 International License
This work is licensed under a Creative Commons Attribution 4.0 International License.

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