Nanoindentation Technique for Characterizing Cantilever Beam Style RF Microelectromechanical Systems (MEMS) Switches

Authors

Hyukjae Lee, Air Force Institute of Technology
Ronald A. Coutu Jr., Marquette UniversityFollow
Shankar Mall, Air Force Institute of TechnologyFollow
Paul E. Kladitis, Air Force Institute of TechnologyFollow

Document Type

Article

Language

eng

Publication Date

4-29-2005

Publisher

IOP Publishing

Source Publication

Journal of Micromechanics and Microengineering

Source ISSN

0960-1317

Abstract

A nanoindentation technique was used to mechanically actuate a radio frequency micro-switch along with the measurement of contact resistance to investigate its applicability to characterize deflection and contact resistance behaviors of micro-sized cantilever beam switches. The resulting load–displacement relationship showed a discontinuity in slope when the micro-switch closed. The measured spring constants reasonably agreed with theoretical values obtained from the simple beam models. The change in contact resistance during test clearly indicated micro-switch closure but it did not coincide exactly with the physical contact between two electric contacts due to a resistive contaminated film.

Comments

Accepted version. Journal of Micromechanics and Microengineering, Vol. 15, No. 6 (April 29, 2006): 1230. DOI. © 2006 IOP Publishing. Used with permission.

Ronald A Coutu Jr. Sensors Directorate, Air Force Research Laboratory, Wright-Patterson Air Force Base, OH at the time of publication.

Recommended Citation

Lee, Hyukjae; Coutu, Ronald A. Jr.; Mall, Shankar; and Kladitis, Paul E., "Nanoindentation Technique for Characterizing Cantilever Beam Style RF Microelectromechanical Systems (MEMS) Switches" (2005). Electrical and Computer Engineering Faculty Research and Publications. 341.
https://epublications.marquette.edu/electric_fac/341