Journal of Micromechanics and Microengineering
A nanoindentation technique was used to mechanically actuate a radio frequency micro-switch along with the measurement of contact resistance to investigate its applicability to characterize deflection and contact resistance behaviors of micro-sized cantilever beam switches. The resulting load–displacement relationship showed a discontinuity in slope when the micro-switch closed. The measured spring constants reasonably agreed with theoretical values obtained from the simple beam models. The change in contact resistance during test clearly indicated micro-switch closure but it did not coincide exactly with the physical contact between two electric contacts due to a resistive contaminated film.
Lee, Hyukjae; Coutu, Ronald A. Jr.; Mall, Shankar; and Kladitis, Paul E., "Nanoindentation Technique for Characterizing Cantilever Beam Style RF Microelectromechanical Systems (MEMS) Switches" (2005). Electrical and Computer Engineering Faculty Research and Publications. 341.
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