Nanoindentation Technique for Characterizing Cantilever Beam Style RF Microelectromechanical Systems (MEMS) Switches
Journal of Micromechanics and Microengineering
A nanoindentation technique was used to mechanically actuate a radio frequency micro-switch along with the measurement of contact resistance to investigate its applicability to characterize deflection and contact resistance behaviors of micro-sized cantilever beam switches. The resulting load–displacement relationship showed a discontinuity in slope when the micro-switch closed. The measured spring constants reasonably agreed with theoretical values obtained from the simple beam models. The change in contact resistance during test clearly indicated micro-switch closure but it did not coincide exactly with the physical contact between two electric contacts due to a resistive contaminated film.
Lee, Hyukjae; Coutu, Ronald A. Jr.; Mall, Shankar; and Kladitis, Paul E., "Nanoindentation Technique for Characterizing Cantilever Beam Style RF Microelectromechanical Systems (MEMS) Switches" (2005). Electrical and Computer Engineering Faculty Research and Publications. 341.
ADA accessible version
Accepted version. Journal of Micromechanics and Microengineering, Vol. 15, No. 6 (April 29, 2006): 1230. DOI. © 2006 IOP Publishing. Used with permission.
Ronald A Coutu Jr. Sensors Directorate, Air Force Research Laboratory, Wright-Patterson Air Force Base, OH at the time of publication.